A method and an apparatus are presented for correcting corner images of an integrated circuit pattern, for example, in an real image produced by optical scanning and deleting defects from the corner sections. Design data describing rectangular or trapezoidal patterns are expanded in a design data expansion...http://www.google.com/patents/US6504947?utm_source=gb-gplus-sharePatent US6504947 - Method and apparatus for multi-level rounding and pattern inspection
