(19) United States
(12) Patent Application Publication (io) Pub. No.: US 2005/0088767 Al
Reboa (43) Pub. Date: Apr. 28,2005
(76) Inventor: Paul F. Reboa, Corvallis, OR (US)
Intellectual Property Administration
P.O. Box 272400
Fort Collins, CO 80527-2400 (US)
(21) Appl. No.: 10/976,232
(22) Filed: Oct. 26, 2004
Related U.S. Application Data
(62) Division of application No. 10/387,312, filed on Mar. 12, 2003, now Pat. No. 6,844,953.
A micro-mirror device includes a substrate having a surface, and a plate spaced from and oriented substantially parallel to the surface of the substrate such that the plate and the surface of the substrate define a cavity therebetween. A dielectrophoretic liquid capable of movement when an electrical signal is applied to the micro-mirror device is disposed in the cavity, and a reflective element is interposed between the surface of the substrate and the plate such that the reflective element is adapted to move between a first position and at least one second position. The dielectrophoretic liquid includes at least one compound selected from the group consisting of siloxanes and silanes substantially free of asymmetrical ether linkages.