IIIH
US007099432B2
(12) United States Patent ao) Patent No.: Us 7,099,432 B2
Ichihara et al. (45) Date of Patent: Aug. 29,2006
(54) X-RAY INSPECTION APPARATUS AND
X-RAY INSPECTION METHOD
(75) Inventors: Masaru Ichihara, Ashiya (JP); Shinji
Yoshino, Nishinomiya (JP); Hiroyuki
Inoue, Yawata (JP); Toshio Kinoshita,
Katano (JP); Kazuo Ohuchi, Hojo (JP)
(73) Assignee: Matsushita Electric Industrial Co.,
Ltd., Osaka (JP)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.
(21) Appl. No.: 10/924,363
(22) Filed: Aug. 23, 2004
(65) Prior Publication Data
US 2005/0074088 Al Apr. 7, 2005
(30) Foreign Application Priority Data
Aug. 27, 2003 (JP) 2003-303188
Sep. 22, 2003 (JP) 2003-330180
(51) Int. CI.
G01N 23/083 (2006.01)
(52) U.S. CI 378/25; 378/21; 378/208
(58) Field of Classification Search 378/208,
378/24, 57, 21, 23, 118, 117, 199, 127, 25-27 See application file for complete search history.
