[54] PROCESSING APPARATUS AND PROCESSING METHOD
[75] Inventors: Kiyohisa Tateyama, Kumamoto;
Masafumi Nomura; Takayuki Tomoeda, both of Kumamoto-ken, all of Japan
[73] Assignees: Tokyo Electron Limited, Tokyo;
Tokyo Electron Kyushu Limited,
Tosu, both of Japan
[21] Appl. No.: 08/936,723 [22] Filed: Sep. 25, 1997
Related U.S. Application Data
[62] Division of application No. 08/929,106, Sep. 15, 1997, Pat. No. 5,871,584, which is a continuation of application No. 08/510,297, Aug. 2, 1995, abandoned.
[30] Foreign Application Priority Data
Aug. 3, 1994 [JP] Japan 6-200289
[51] Int. CI. B05D 3 12
[52] U.S. CI 427/240; 427/345; 427/350;
427/353; 118/52; 118/320
[58] Field of Search 427/240, 345,
427/346, 350, 353; 118/52, 320, 326
[56] References Cited
U.S. PATENT DOCUMENTS
3,656,173 4/1972 Fussel .
4,510,176 4/1985 Cufhbert et al 427/82
4,587,203 5/1986 Brault et al 430/325
4,688,918 8/1987 Suzuki et al 354/325
4,894,260 1/1990 Kumasaka et al 427/241
4,941,745 7/1990 Sugiyama 356/401
5,069,156 12/1991 Suzuki 118/52
5,084,483 1/1992 Yamashita et al 521/40
5,159,374 10/1992 Groshong 354/317
5,209,180 5/1993 Shoda et al 118/52
5,275,658 1/1994 Kimura 118/302
5,429,912 7/1995 Neoh 430/325
FOREIGN PATENT DOCUMENTS
3262563 11/1991 Japan .
7136572 5/1995 Japan .
Primary Examiner—Michael Lusignan
Assistant Examiner—Michael Barr
Attorney, Agent, or Firm—Obion, Spivak, McClelland,
Maier & Neustadt, PC.
[57] ABSTRACT
A develop processing apparatus is provided for processing an object with a developing solution, comprising a retaining member for rotatably retaining the object, a developing solution supply nozzle for supplying the developing solution to the object, a developing solution sucking nozzle for sucking the developing solution supplied to the object, a developing solution supply nozzle moving mechanism for moving the developing solution supply nozzle above the object, a developing solution sucking nozzle moving mechanism for moving the developing solution sucking nozzle above the object. After the developing solution is supplied to the object subsequent to moving the developing solution supply nozzle, the developing solution sucking nozzle is moved and the developing solution on the object is sucked.
7 Claims, 7 Drawing Sheets
