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(12) United States Patent
McGill et al.
(io) Patent No.: (45) Date of Patent:
US 7,556,775 B2 Jul. 7, 2009
(75) Inventors: Robert Andrew McGill, Lorton, VA
(US); Ioana Voiculescu, Washington,
DC (US); Gary K. Fedder, Turtle Creek,
(73) Assignee: The United States of America as
represented by the Secretary of the
Navy, Washington, DC (US)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 804 days.
(21) Appl.No.: 11/136,763
(22) Filed: May 25, 2005
(65) Prior Publication Data
US 2005/0276726 Al Dec. 15, 2005
Related U.S. Application Data
(60) Provisional application No. 60/574,388, filed on May 25, 2004.
(51) Int. CI.
G01N 27/00 (2006.01)
G01N 27/04 (2006.01)
G01N 27/12 (2006.01)
(52) U.S. CI 422/88; 73/1.02; 73/24.01;
73/335.02; 73/335.05; 422/82.01; 422/82.02;
422/83; 422/96; 422/97; 422/98
(58) Field of Classification Search 422/50,
422/88; 435/6; 73/35 See application file for complete search history.
(56) References Cited
U.S. PATENT DOCUMENTS
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5,083,466 A * 1/1992 Holm-Kennedy
A microelectro-mechanical chemical sensor includes an active cantilever beam having a chemically selective material layer disposed thereon and at least one, preferably two, resistors with the resistance corresponding to the cantilever beam deflection. The sensor also has at least two, and preferably four, auxiliary cantilever beams adjacent to the active cantilever and attached to the same substrate, each having a piezoresistor disposed thereon. The piezoresistors are elements of a Wheatstone bridge, and the Wheatstone bridge output indicates the amount of a predetermined target chemical sorbed by the chemically selective material layer. The sensor is electrostatically actuated in order to monitor the resonant frequency.
24 Claims, 7 Drawing Sheets
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* cited by examiner