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(i9) United States
(12) Patent Application Publication
Sandstrom et al.
(io) Pub. No.: US 2007/0253459 Al (43) Pub. Date: Nov. 1, 2007
(54) EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER
(75) Inventors: Richard L. Sandstrom, Encinitas, CA (US); Tae (Mark) H. Chung, Murrieta, CA (US); Richard C. Ujazdowski,
Poway, CA (US)
Matthew K. Hillman
Cymer, Inc., Legal Dept.
17075 Thornmint Court
San Diego, CA 92127-2413 (US)
(73) Assignee: Cymer, Inc., San Diego, CA
(21) Appl. No.: 11/787,463
(22) Filed: Apr. 16, 2007
Related U.S. Application Data
(60) Continuation-in-part of application No. 10/854,614, filed on May 25, 2004, now Pat. No. 7,218,661. Division of application No. 10/056,619, filed on Jan. 23, 2002, now Pat. No. 6,801,560, which is a continuation-in-part of application No. 10/036,676, filed on Dec. 21, 2001, now Pat. No. 6,882,674, which is a continuation-in-part of application No. 10/036,727, filed on Dec. 21, 2001, now Pat. No. 6,865,210,
which is a continuation-in-part of application No. 10/012,002, filed on Nov. 30, 2001, now Pat. No. 6,625,191, which is a continuation-in-part of application No. 10/006,913, filed on Nov. 29, 2001, now Pat. No. 6,535,531, which is a continuation-in-part of application No. 10/000,991, filed on Nov. 14, 2001, now Pat. No. 6,795,474, which is a continuation-inpart of application No. 09/970,503, filed on Oct. 3, 2001, now abandoned.
(51) Int. CI.
H01S 3/097 (2006.01)
H01S 3/038 (2006.01)
(52) U.S. CI 372/87
Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc.