Pattern-aligned carbon nanotube growth and tunable resonator apparatus

(21) Appl. No.: 10/113,247

(22) Filed: Apr. 1, 2002

(65) Prior Publication Data

US 2002/0167374 Al Nov. 14, 2002

Related U.S. Application Data

(60) Provisional application No. 60/280,579, filed on Mar. 30, 2001, and provisional application No. 60/280,591, filed on Mar. 30, 2001.

(51) Int. CI.7 H03H 9/24; H03H 9/46;

D01F 9/12

(52) U.S. CI 333/186; 333/197; 423/447.3;

310/36; 310/37; 205/766; 205/768

(58) Field of Search 333/186, 197;

423/447.3; 310/36, 37; 205/766, 768

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A tunable nanomechanical oscillator device and system is provided. The nanomechanical oscillator device comprising at least one nanoresonator, such as a suspended nanotube, designed such that injecting charge density into the tube (e.g. by applying a capacitively-cuopled voltage bias) changes the resonant frequency of the nanotube, and where exposing the resonator to an RF bias induces oscillitory movement in the suspended portion of the nanotube, forming a nanoscale resonator, as well as a force sensor when operated in an inverse mode. A method of producing an oriented nanoscale resonator structure with integrated electrodes is also provided.

41 Claims, 11 Drawing Sheets

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