APPARATUS FOR APPLYING ATOMIZED ADHESIVE TO A LEADFRAME FOR CHIP BONDING
 Inventor: Sven Evers, Boise, Id.
 Assignee: Micron Technology, Inc., Boise, Id.
[ * ] Notice: This patent is subject to a terminal disclaimer.
 Appl. No.: 09/370,918  Filed: Aug. 9, 1999
Related U.S. Application Data
 Division of application No. 09/133,339, Aug. 13, 1998, which is a continuation of application No. 08/613,315, Mar. 11, 1996, Pat. No. 5,810,926.
 Int. C I. B05C 5/02
 U.S. CI 118/50; 118/301; 118/304;
118/309; 118/326; 118/DIG. 7
 Field of Search 118/50, 309, 326,
118/304, DIG. 7, 301; 156/578, 356, 381
An apparatus and method for evenly applying an atomized adhesive for bonding a die to a leadframe is disclosed. In one embodiment the apparatus includes a hood in communication with an air supply and a vacuum plenum that encompass a semiconductor device component located in a target area during adhesive application so that the adhesive is selectively applied to specific portions of the leadframe or other semiconductor device component and adhesive is not allowed outside the system. A mask or stencil may be employed for further prevention of adhesive application to undesired areas. An air purge may be employed to direct the adhesive mist toward the component to be coated. In another embodiment, a fine adhesive spray is directed against the surface of the workpiece to be coated, selected areas being masked to prevent coating. Wafers may be coated as well as leadframes.
19 Claims, 6 Drawing Sheets