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US 20100216297A1

(i9) United States

(12) Patent Application Publication oo) Pub. No.: US 2010/0216297 Al

Forbes (43) Pub. Date: Aug. 26,2010

(54) METHODS FOR FABRICATING

SEMICONDUCTOR DEVICE STRUCTURES

(75) Inventor: Leonard Forbes, Corvallis, OR

(US)

Correspondence Address:

TRASK BRITT, P.C./ MICRON TECHNOLOGY
P.O. BOX 2550

SALT LAKE CITY, UT 84110 (US)

(73) Assignee: MICRON TECHNOLOGY, INC.,

Boise, ID (US)

(21) Appl.No.: 12/776,018

(22) Filed: May 7, 2010

Related U.S. Application Data

(62) Division of application No. 11/726,998, filed on Mar. 23, 2007.

Publication Classification

(51) Int. CI.

H01L 21/20 (2006.01)

(52) U.S. CI 438/478; 257/E21.09

(57) ABSTRACT

Methods for fabricating semiconductor device structures are disclosed. In some embodiments, methods for fabricating semiconductor device structures may comprising forming at least one raised element on a surface of a substrate, the at least one raised element of the plurality including sloped sides and a peak, aligning a strip comprising conductive material at least partially over the at least one raised element, and at least partially securing the strip to a surface of the at least one raised element and the surface of the substrate.

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