System and method for using first-principles simulation to control a ...

102 102 102 DEVICE Z Z 3 REMOTE MANUEQETURING RESOURCES Tool Tool Tool 308 312 I I I St d I “st d I Simul Simul. Simul. .°" “F” .°" ° 9“ ' Slmulotlon Simulation Module Module Module Module 304 Mod“ 8 302 302 302 306 I;1,\>C—Ievd ‘M Commung \ Controller 314 W Tool-leveI ( Ubrory 316 31° Fob—level Library

FIG. 3

Performed by the Semiconductor Processing Tool . . . . 403 Input F1rstPr1nc1ples Physical Model For N Emulating a Physical Sensor Perform First Principles Sfiaulation 405

Using Input Data and First Principles N
Physical Model to
Provide a Virtual Sensor Measurement

612 614

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J”°2 _ PROCESS SUBSTRATE! BATCH F“ MEASURE TOOL DATA 5 706 SET MODEL BCIIC WITH TOOL DATA 708 EXECUTE FIRST J PRINCIPLES MODEL

FIG. 7.