Embodiments described herein provide ampoule assemblies to contain, store, or dispense chemical precursors. In one embodiment, an ampoule assembly is provided which includes an ampoule containing a first material layer disposed on the outside of the ampoule and a second material layer disposed over the...http://www.google.com/patents/US7832432?utm_source=gb-gplus-sharePatent US7832432 - Chemical delivery apparatus for CVD or ALD
