the present invention provides a force transducer having high compression fracture strength and high detection sensitivity, thus satisfying both detection precision and reliability, and also a method of fabricating such a force transducer. The force transducer is so constructed that a compression...http://www.google.com/patents/US5773728?utm_source=gb-gplus-sharePatent US5773728 - Force transducer and method of fabrication thereof
Force transducer and method of fabrication thereof