In an embodiment, a method of creating an alignment mark on a substrate includes forming a plurality of lines segmented into electrically conducting line segments and space segments, thereby forming spaces between the lines to form a macroscopic structure in a first layer of the substrate, creating a...http://www.google.com/patents/US7989303?utm_source=gb-gplus-sharePatent US7989303 - Method of creating an alignment mark on a substrate and substrate
Method of creating an alignment mark on a substrate and substrate
