A process of manufacturing integrated circuits is disclosed for designing and implementing a hierarchical wiring system. The interconnection requirements are sorted and designed into a particular wiring level according to length. Support structures may be constructed to allow more flexibility in designing...http://www.google.com/patents/US5891797?utm_source=gb-gplus-sharePatent US5891797 - Method of forming a support structure for air bridge wiring of an integrated circuit
Method of forming a support structure for air bridge wiring of an integrated ...