A micro-electromechanical systems (MEMS) device includes bottom and top capacitive plates, such that a capacitor is definable therebetween. A mechanism is electrostatically movably disposed between the bottom and top capacitive plates. One or more flexures are movably disposed between the bottom capacitive...http://www.google.com/patents/US7741751?utm_source=gb-gplus-sharePatent US7741751 - MEMS device having distance stops
