并行飞秒激光双光子光聚合微纳加工方法及其装置 Parallel femtosecond laser photon polymerization method and apparatus for micro-nanofabrication

技术领域 Technical Field

本发明是一种微纳加工技术，采用飞秒激光双光子吸收和微透镜阵列的并行加工方法，适用于多种光敏树脂材料三维微纳结构的制备。 The present invention is a micro-nanofabrication technology, femtosecond laser two-photon absorption and a microlens array parallel processing method for preparing a variety of photosensitive resin material three-dimensional micro- and nanostructures applies.

背景技术 Background

随着微机电系统应用领域的飞速发展，人们对微细加工的要求不仅向缩小尺寸和提高精度等方向进行，而且越来越向着加工多样化的方向发展。 With the rapid development of MEMS applications, people microfabrication requirements not only to reduce the size and improve the precision direction, but more and more toward the direction of diversification process. 传统用于微型机械的制造技术已经不能满足其进一步发展的要求， Traditionally used for the manufacture of micro-mechanical technology can not meet the requirements of its further development,

1931年，Goppert-Mayor提出双光子吸收理论，直到1992年，webb小组才将双光子技术引入了微细加工领域。 In 1931, Goppert-Mayor put forward the theory of two-photon absorption, until 1992, webb team before the two-photon microfabrication technology into the field. 1997年，Kawata等用双光子吸收技术首次在光致聚合物中制作出各种三维微观结构型，其空间分辨尺度达到微米量级；2001年，大阪大学S.Kawata在NATURE报道了采用双光子聚合法在光敏树脂里面制作了10拜长，7nm髙的公牛，分辨率达到120nm,是世界上最小的人造动物模型，同时还制作了直径达亚微米的微型弹簧振子，使飞秒激光双光子的微细加工真正开始步入了亚微米功能器件的制造阶段。 In 1997, Kawata and other technology for the first time by two-photon absorption in photopolymer produce a variety of three-dimensional microstructures type, the spatial resolution of the order of micrometer scale; in 2001, Osaka University S.Kawata in NATURE reported the use of two-photon polymerization in the photosensitive resin which produced a 10 thanks to a long, 7nm Gao bull, resolution of 120nm, is the smallest of the world's man-made animal models, but also produced a miniature spring oscillator Dexia micron diameter, femtosecond laser two-photon microfabrication really began to enter the manufacturing stage submicron features of the device. 由于飞秒激光双光子光聚合技术具有无掩模、高分辨、真三维、冷加工等优点，引起了国内外科学家的充分关注，至今飞秒激光双光子光聚合技术已成为目前国际材料科学研究领域的热点之一。 Since femtosecond laser photon polymerization technique with no mask, high-resolution, true three-dimensional, cold, etc., caused by the full attention of scientists at home and abroad, has femtosecond laser photon polymerization technology has become the international materials science field one of the hot.

双光子微细加工技术以微电子、微光学、微机械为核心，集现代光学、电子学、激光技术、精密机械、计算机技术和智能控制技术等于一体，成为近年来飞秒激光应用技术方面的研究热点。 Two-photon microfabrication technology to microelectronics, micro-optics, micro-mechanical as the core set of modern optics, electronics, laser technology, precision machinery, computer technology and intelligent control technology is one that has become recent studies of femtosecond laser application technology hotspots. 飞秒激光双光子微细加工技术，首先是将飞秒脉冲聚焦在透明的光敏树脂上，引发双光子聚合，液体树脂转变为固体，当激光焦点沿三维树脂移动时，聚合作用沿焦点的踪迹产生。 Femtosecond laser two-photon microfabrication technology, is the first femtosecond laser pulse focused on a transparent photosensitive resin, two-photon polymerization initiators, liquid resin into a solid, when the laser focus moves along a three-dimensional resin, a polymerization focus along the trail generation . 这使得我们可应用激光在树脂内直接制造由计算机产生的任何三维结构,未被辐照的液体树脂在酒精中熔化。 This allows us to apply laser in any three-dimensional structure of the resin produced directly by a computer-generated, non-irradiated liquid resin melt in alcohol.

将飞秒激光技术引入到三维微细加工中实现材料的双光子吸收，使这种新型的微细加工技术表现出了很多优良特性。 The femtosecond laser technology into a three-dimensional microfabrication to achieve the two-photon absorption material, so that this new microfabrication techniques showed a lot of excellent features. （1)由于双光子吸收几率与光强度的平方成正比，所以双光子吸收引发的光化学反应将被局限在光强度很高的焦点附近极小的区域内（体积数量级为X3)。 Photochemical reaction (1) Due to the two-photon absorption probability proportional to the square of the light intensity, so the two-photon absorption induced it is confined to a very small light near the high intensity of the focus area (volume of the order of X3). 激光的强度在空间上一般呈髙斯分布，如果调节入射激光束，使得焦斑的中心强度刚好满足材料的多光子电离阈值， 可以使加工分辨率突破光束衍射极限的限制.实现尺寸小于波长的亚微米级或纳米级操作；（2)入射的飞秒激光只有在焦点位置才能获得较髙的功率密度，发生多光子吸收和电离，从而实现材料内部三维空间上任意部位的超精细加工，使得飞秒激光加工过程具有严格的空间定位选择能力，实现真正的三维加工；（3)加工方式并不局限于传统的层叠方式,双光子加工过程中只要精确地控制激光束焦点的扫描动作就可以实现对材料的"直接写入"，从而快速地加工出预先设计的微器件。 Intensity of the laser in space ships were Gaussians distribution, if the adjustment of the incident laser beam, so that the center of the focal spot intensity just to meet the multi-photon ionization threshold materials, you can make processing breakthrough beam diffraction limit of the resolution limit. Achieve a size smaller than the wavelength submicron or nanometer level operations; (2) an incident femtosecond laser only at the focus position to obtain more power density Gao, multiphoton absorption and ionization occur, in order to achieve any part of the three-dimensional space on the internal material ultra-fine processing, so femtosecond laser processing with strict spatial orientation selection capability, a real three-dimensional processing; (3) the processing methods are not limited to the traditional lamination method, as long as the two-photon process to precisely control the focal point of the laser beam scanning operation can be realization of material "direct write", thus quickly pre-designed micro-machined devices. 这同时也保证了双光子微细加工具有很强的柔性：不需要对加工系统的结构做任何调整就可以通过改变CAD的设计模型实现新器件的加工。 This also ensures that the two-photon microfabrication with strong flexibility: the structure of the processing system does not need to make any adjustments can be achieved by varying the processing of new devices CAD design model. （4)与传统的光刻技术相比，双光子微细加工技术可实现非接触式加工，具有节能、清洁无污染、加工效率髙、加工精确、不需要真空条件等一系列优点。 (4) Compared with conventional photolithography technique, two-photon microfabrication technology to achieve non-contact processing, energy saving, clean and non-polluting, processing efficiency Gao, precision machining, no vacuum conditions and a series of advantages.

然而，飞秒激光双光子光聚合是基于单光束的微纳加工方法，因此加工效率很低，极大的限制了大批量生产的需要，成为限制该方法发展的一个瓶颈。 However, the femtosecond laser photon polymerization is based on a single beam of micro-nanofabrication methods, so the processing efficiency is very low, which greatly limits the need for mass production, limiting the development of methods to become a bottleneck. 1982年，Oikawa和Iga提出了一种制备微透镜阵列的方法，为双光子光聚化的并行加工提供了可能性。 1982, Oikawa and Iga proposed a method for preparing a microlens array, a two-photon polymerization of parallel processing to provide the possibility. 在此基础上，日本大阪大学的Hong-Bo Sun等人于2005年提出了采用微透镜阵列进行多点并行微纳加工技术，通过优化曝光条件达到了超过200点的并行加工，并且在光敏树脂中制备了二维微字母阵列和三维微弹簧阵列，其分辨率达到250nm。 On this basis, the Osaka University of Hong-Bo Sun, who proposed in 2005 the use of micro-lens array multi-parallel micro-nanofabrication technology, achieved by optimizing the exposure conditions parallel processing of more than 200 points, and the photosensitive resin prepared in a two-dimensional and three-dimensional micro-micro letter array of springs, the resolution of 250nm. 因此，基于微透镜阵列的并行飞秒激光双光子光聚合技术在批量微纳器件的加工方面表现出了极大的优越性。 Therefore, based on parallel femtosecond laser micro-lens array photon polymerization technique in batch processing micro and nano devices showed great superiority. 但是，在制备过程中也存在着以下不足：（1)由于飞秒激光束服从高斯分布，因此在光束的截面上光强沿半径方向越来越小，使照射到微透镜阵列上的光的分布不均匀，导致在不同微透镜上具有光强度的差异，从而引起所制备的微器件的分辨率的变化。 However, during the preparation, there are also less than the following: (1) Since the femtosecond laser beam Gaussian distribution, and therefore the light intensity in the beam cross-section along the radial direction smaller and smaller, so that exposure to light on the microlens array uneven, resulting in differences in light intensity in having different microlens, causing changes in the resolution prepared microdevices. （2)在微透镜阵列的空隙处也会有多余的飞秒激光照射到，从而引起了能量的大量损失。 (2) at the space in the microlens array will have excess femtosecond laser is irradiated, causing a substantial loss of energy.

发明内容 DISCLOSURE

本发明的目的是提供一种离精度微纳器件大批量生产的飞秒激光双光子光聚合微纳加工系统装置，它是一种集飞秒激光技术、阵列光纤技术和阵列微聚焦透镜技术于一体的并行双光子光聚合三维微纳加工技术。 The purpose of the present invention is to provide a precision micro and nano devices from mass production of femtosecond laser photon polymerization micro-nanofabrication system device, which is a set of femtosecond laser technology, the array of optical fiber technology and an array of micro-lens technology to focus on one of the parallel two-photon polymerization dimensional micro-nanofabrication technologies.

本发明所述的加工方法按照如下的步骤实现： Processing method of the present invention according to the following steps to achieve:

首先，开启泵浦激光器，将其产生的激光引入到飞秒激光器的谐振腔中，经振荡后产生的飞秒超短脉冲激光通过再生放大器将能量放大，然后，放大后的激光经过全反镜、衰减镜、光闸后，由光纤耦合器将其辆合到光纤阵列中，由微透镜阵列将飞秒激光聚焦到放置在盖玻片上的光敏树脂中，盖玻片固定在三维扫描平台上，通过计算机控制系统控制连接于三维扫描平台上的驱动器来实现三维扫描平台的微动调节。 First, open the pump laser, the laser which generates femtosecond laser is introduced into the cavity, after femtosecond pulse laser oscillation generated by the regenerative amplifier energy amplification, then amplified through the whole laser mirror After attenuation mirror, shutter, by an optical fiber coupler to vehicles bound to the fiber array, the microlens array femtosecond laser focus to be placed on the cover glass of a photosensitive resin, cover glass is fixed to the three-dimensional scanning platform By computer control system is connected to the drive on a three-dimensional scanning platform to achieve three-dimensional scanning platform micro adjustment. 整个加工过程由CCD实时监控。 The whole process real-time monitoring by the CCD.

徼加工之前，在盖玻片上放置掺杂了染料的薄膜，打开激光光源，使透过微透镜阵列的飞秒激 Before Jiao processing, the cover glass is placed in a dye-doped film, open the laser light, so that through the microlens array of femtosecond laser

光能够引发荧光的产生，在水平方向移动三维扫描平台，调节微透镜阵列.使由CCD观察到的各焦点处的荧光强度基本一致，即说明微透镜阵列中各透镜的焦点所组成的平面与盖玻片所在平面重合。 Fluorescent light can trigger the generation of three-dimensional scanning in the horizontal direction to move the platform to adjust a microlens array. Makes the CCD focal point of each of the observed fluorescence intensity of basically the same, i.e., the microlens array described in the focal plane of each lens is composed of It coincides with the plane of the cover slip. 此时关闭光闸，在盖玻片上滴上光敏树脂。 At this time closing the shutter on the cover slip drip onto the photosensitive resin. 在制造过程中，通过计箅机对光闸和三维扫描平台的协调控制来实现光敏树脂内的选择性曝光，从而使光敏树脂在需要的位置固化：同时可以通过调节衮减镜来控制激光能量以实现不同的加工尺寸。 In the manufacturing process, coordinated by the light meter grate machine control gate and three-dimensional scanning platform to achieve selective exposure of the photosensitive resin inside, so that the photosensitive resin cured in the desired location: at the same time can be adjusted by controlling the laser gun to reduce energy mirrors to achieve different processing size.

实现本发明的装置由激光发生系统、外光路系统以及加工控制系统依次组成。 Implementation of the invention means for generating system consists of a laser, the optical path system and process control systems that order. 由于采用并行加工，原来由飞秒激光器提供的能量己不能满足多点同时达到双光子光聚合所霈要的能量，因此通过再生放大器对能蕭进行放大，以满足加工的需要。 As a result of parallel processing, originally supplied by the femtosecond laser energy has not reached the same time meet the multi-point two-photon polymerization Pei want energy, by regenerative amplifier can amplify Shaw to meet the needs of processing. 衰减镜用于调节制造过程中所需的激光能量，光闸用来控制飞秒激光的通断，光纤阵列和微透镜阵列可以调节每次所要加工的器件数。 Attenuation mirror for adjusting the laser energy required for the manufacturing process, on-off, the optical fiber array and a microlens array is used to control the shutter of the femtosecond laser can be adjusted every time the number of devices to be processed. 软件控制系统一方面能够协调三维扫描平台的运动和光闸的开关，以实现加工材料在正确位置上的双光子檄发，另一方面可灵活地调整加工速度，改变曝光时间，以满足不同的加工要求。 Software control system on the one hand to coordinate the movement and the shutter switch three-dimensional scanning platform to achieve processing of materials in the correct position on the two-photon olive hair, on the other hand can flexibly adjust the processing speed, changing the exposure time to meet different processing Claim.

与传统的单光束飞秒激光双光子光聚合微纳加工技术及Hong-Bo Sun等人提出多点并行微纳加工技术相比，本发明提出的微纳加工方法具有以下技术优势： With the traditional single-beam two-photon polymerization femtosecond laser micro-nanofabrication technologies and Hong-Bo Sun, who proposed multi-parallel micro-nanofabrication technology compared to the present invention provides a method of micro-nanofabrication technology has the following advantages:

通过光纤阵列和微透镜阵列，可以实现更髙的加工分辨率，并且可以大批量地进行真正的三维微纳器件的制备：同时可以根据加工器件数量的要求适当选择光纤的数目。 Through the optical fiber array and a microlens array, we can achieve more Gao processing resolution, and may be prepared true 3D micro and nano devices in large quantities were: the number of simultaneous optical device can be appropriately selected depending on the number of requests processed.

由于采用光纤阵列，使激光能量能够几乎平均地分配到各根光纤中，不会受到飞秒激光的高斯分布的影响，从而使得整个加工区域具有一致的加工分辨率和加工精度。 As a result of the optical fiber array, the laser energy can be almost evenly distributed to the individual fibers, the impact will not be femtosecond laser Gaussian distribution, so that the entire processing region has a uniform resolution and precision machining.

采用与微透镜阵列匹配的光纤阵列，可以使激光能量不会照射到微透镜阵列的缝隙中，大大减少了能童的损失，从而能够实现更大批量的加工。 Using the microlens array matching the array of optical fibers, laser energy can not be radiated to the microlens array in the gap, can greatly reduce the loss of the child, it is possible to achieve greater bulk processing.

附图说明 Brief Description

图l并行飞秒激光双光子光聚合微纳加工的装置示意图图2微透镜阵列俯视示意图 Figure l parallel femtosecond laser photon polymerization plan view of the micro-nanofabrication apparatus Figure 2 a schematic view of a microlens array

1泵浦源，2飞秒激光器，3再生放大器，4全反镜，5衰减镜，6光闸，7光纤耦合器， 8光纤阵列，9微透镜阵列，10盖玻片.11三维扫描平台，12光敏树脂，13 CCD, 14驱动器，15计算机控制系统，16微透镜 A pump source, femtosecond lasers 2, 3 regenerative amplifier, totally reflecting mirror 4, 5 attenuation mirror, shutter 6, 7 fiber coupler, 8 fiber array, a microlens array 9, 10 three-dimensional scanning platform coverslip .11 , the photosensitive resin 12, 13 CCD, 14 drive, the computer control system 15, the microlens 16

具体实施方式 DETAILED DESCRIPTION

结合图l示例的并行飞秒激光双光子光聚合微纳加工的装置示意图对本发明的具体装置的细节和实施情况作如下说明： Figure l example of a parallel combination of femtosecond laser photon polymerization micro nanofabrication apparatus schematic detail specific device of the present invention and the implementation will be explained:

实现并行飞秒激光双光子光聚合微纳加工的装置主要由激光发生系统、外光路系统以及加工控制系统组成。 Implement parallel femtosecond laser photon polymerization micro nanofabrication apparatus main system, outside the optical system and process control system consists of laser generating components. 其中激光发生系统包括泵浦光源l、飞秒激光器2和再生放大器3。 Wherein the laser system comprises a pump light source occurs l, femtosecond lasers 2 and 3 regenerative amplifier. 外光路系统包括调光体系和光束聚焦体系，主要组成元件有全反镜4、衰减镜5、光闸6、光纤耦合器7、光纤阵列8和微透镜阵列9等。 External optical system includes a dimming system and beam focusing system, the main constituent elements of a full-reflecting mirror 4, attenuation mirror 5, the shutter 6, fiber optic coupler 7, the optical fiber array 8 and the microlens array 9 and so on. 加工控制系统包括两个部分，即微纳加工系统和软件控制系统，主要由盖玻片IO、 三维扫描平台ll、光敏树脂12、 CCD13、驱动器14、计算机控制系统15组成。 Process control system consists of two parts, namely micro-nanofabrication systems and software control system, mainly by the cover glass IO, three-dimensional scanning platform ll, the photosensitive resin 12, CCD13, drive 14, the computer control system 15 components. 上述各组成元件依次连接构成并行飞秒澉光双光子光聚合微纳加工系统。 Each of the constituent elements in turn connected to form parallel Gan femtosecond light photon polymerization micro and nanofabrication systems.

加工时，将泵浦激光器1产生的激光引入到飞秒激光器2的谐振腔，振荡后产生的飞秒超短脉冲激光经过再生放大器3后将能量放大，以提供实现大批量生产所需要的更高的光强。 The processing, the laser pump laser 1 generates introduced into the femtosecond laser cavity 2, femtosecond laser pulses after the oscillation energy through regenerative amplifier 3 after amplification to achieve mass production needed to provide more high light intensity. 放大后的激光经过全反镜4、衰减镜5、光闸6后，由光纤耦合器7将其耦合到光纤阵列8中，从光纤阵列出来的飞秒激光由微透镜阵列9聚焦到放置在盖玻片10上的光敏树脂12中，盖玻片固定在三维扫描平台ll上。 Laser amplified through the whole mirror 4, attenuation mirror 5, 6 after the shutter, by an optical fiber coupler 7 which is coupled to the optical fiber array 8 from the optical fiber array out of femtosecond laser is focused by the microlens array 9 to be placed in The photosensitive resin cover glass 10 is 12, the cover glass is fixed to the three-dimensional scanning platform ll. 整个加工过程由CCD 13监控，三维扫描平台11的微动调节通过计算机控制系统15控制连接于三维扫描平台11上的驱动器14来实现。 The whole process is monitored by the CCD 13, the three-dimensional scanning platform 11 is regulated by micro-computer control system 15 is connected to the drive control 11 of the 14 three-dimensional scanning platform to achieve.

图2是微透镜阵列俯视示意图，其中的每个小圆点代表一个微透镜16。 Figure 2 is a schematic plan view of a microlens array, wherein each dot represents a microlens 16. 所用的阵列光纤对应于所选择的微透镜阵列。 The microlens array of the selected optical fiber array corresponding to the used.