| Publication number | CN102380709 B |
| Publication type | Grant |
| Application number | CN 201010268576 |
| Publication date | Apr 15, 2015 |
| Filing date | Sep 1, 2010 |
| Priority date | Sep 1, 2010 |
| Also published as | CN102380709A |
| Publication number | 201010268576.8, CN 102380709 B, CN 102380709B, CN 201010268576, CN-B-102380709, CN102380709 B, CN102380709B, CN201010268576, CN201010268576.8 |
| Inventors | 赵天卓, 余锦, 樊仲维, 刘洋, 张雪, 麻云凤, 闫莹 |
| Applicant | 中国科学院光电研究院, 北京国科世纪激光技术有限公司 |
| Export Citation | BiBTeX, EndNote, RefMan |
| Patent Citations (6), Classifications (3), Legal Events (4) | |
| External Links: SIPO, Espacenet | |
技术领域 TECHNICAL FIELD
[0001] 本发明涉及一种激光加工系统，特别是涉及一种三波长混合，并具有能够将皮秒脉冲高斯光束整形为皮秒脉冲平顶高斯光束后的激光加工系统，属于激光精密加工制造技术领域。 [0001] The present invention relates to a laser processing system, particularly to a three-wavelength mixed and picosecond pulses with a Gaussian beam can be shaped into a flattened Gaussian picosecond pulse laser beam machining system after belonging laser precision manufacturing technology.
背景技术 Background technique
[0002] 皮秒脉冲激光由于热量沉积到材料里的过程比热量扩散到加工区域周边的过程快速，这样就可以有效的避免连续激光和宽脉宽脉冲激光在加工中引起的明显热效应，因此也被称之为激光冷加工，皮秒脉冲激光的冷加工依靠被加工物质的应力破坏来实现加工，这与连续激光和宽脉宽脉冲激光熔融物质的热加工存在本质不同。 [0002] picosecond pulsed laser deposition to the heat of the material in the process to process than the heat diffusion processing region surrounding fast, so you can effectively avoid significant thermal effects of continuous pulse width laser and pulsed laser induced in the process, and therefore called cold laser, picosecond pulse laser machining cold stress damage rely substance is to achieve processing, which is continuous and wide width laser pulsed laser melting heat processed material existence essentially different.
[0003] 与普通的高斯光束相比，平顶高斯光束在光斑横截面内能量分布均匀，利用平顶高斯光束对金属材料进行加工时，可以通过调节激光光束的能量(功率)密度，使之低于材料汽化点，来避免材料的汽化和爆裂隙的产生、保证加工结果的平滑化和均匀性。 [0003] Compared with conventional Gaussian beam, flattened Gaussian beam spot in the cross-sectional energy distribution, while the use of flattened Gaussian beam of metal materials for processing, you can adjust the laser beam energy (power) density, making it vaporization point lower than the material, to avoid generating material vaporization and burst fracture, ensure smooth processing results and uniformity. 高斯光束的能量分布如图1，平顶高斯光束的能量分布如图2所示。 Gaussian beam energy energy distribution shown in Figure 1, the flattened Gaussian beam profile shown in Figure 2. 由于平顶高斯光束加工后获得的孔截面是近梯形，这使得在使用平顶高斯光束进行加工时，可以一次加工较宽的范围，并且保证被加工的底面更加平整。 Since the hole sectional flattened Gaussian beam processing after received nearly trapezoid, which makes the use of flattened Gaussian beams for processing, can process a wide range of time, and to ensure a more smooth bottom surface to be machined. 而采用高斯光束加工会出现中间凹边缘高的近高斯形状。 The Gaussian beam processing will be near the middle of the concave edge high Gaussian shape appears. 如果采用多高斯光束同时加工，或者单一高斯光束移位加工，也只能获得由多个高斯分布顶端组合成的波浪形的近似平面，并且采用高斯光束移位加工会降低效率，采用多光束加工时还要受到干涉的影响。 If using multiple Gaussian beam processing, or a single Gaussian beam displacement process, and can only be obtained by a plurality of Gaussian distribution of the top combined into wavy approximate plane and Gaussian beam shift processing will reduce efficiency, the use of multi-beam processing but also by the interference of Rats. 由于平顶高斯光束具有平顶加工的优势，能够更好的实现精细的平整加工，因此将其整合到皮秒激光精细加工中，具有很好的实际意义。 Because of flattened Gaussian beam has the advantage of topping processing, can better achieve fine leveling process, and therefore it is integrated into the picosecond laser fine processing, has good practical significance.
[0004] 申请号为200710020072.2的专利，要求了一种将高斯光束从中间分开，然后将两个截面为半圆的半高斯分布光束背向组合来实现平顶加工的技术方案。 [0004] Patent Application No. 200710020072.2, requires a Gaussian beam will be separated from the middle, then the two semi-circular cross-section semi-Gaussian beam back a combination of technical solutions to achieve a flat top processing. 这种技术方案在连续激光和宽脉宽脉冲激光的热加工中可以较好的使用，但应用在皮秒冷加工系统中时，由于皮秒冷加工的本质与热加工不同，加工结果与光斑形状极为相似。 This aspect can be preferably used in the thermal processing and continuous laser pulse width in the pulsed laser, but when used in picosecond cold system, due to the nature of cold working and thermal processing picosecond different processing results of the spot shape is extremely similar. 而由两个半圆背向组合构成的光斑能量分布并不均匀，因此只能产生接近两个半高斯分布光束背向组合的加工结果，不能很好的实现底面为平顶的加工效果。 The energy generated by the two semicircular spot back combinations thereof is not evenly distributed, it can only produce nearly two and a half back combination of Gaussian beam machining results, not to achieve a good flattened bottom surface machining results.
发明内容 SUMMARY OF THE INVENTION
[0005] 本发明目的在于解决皮秒脉冲高斯光束加工时不能够进行宽范围平顶加工的问题，提供一种多波长混合的，具有可以实现精确平顶加工的皮秒脉宽激光加工系统。 [0005] The object of the present invention can not be carried out to solve a wide range of picosecond pulses flattened Gaussian beam machining processing problems and to provide a multi-wavelength mixed, with a flat top allows accurate processing of picosecond pulse laser processing system.
[0006] 本发明的目的是这样实现的: [0006] The object of the present invention is implemented as follows:
[0007] 本发明提供的用于平顶加工的皮秒脉宽激光加工系统，包括:一个皮秒激光光源I ;一个倍频装置2 ;反射镜组3 个非球面整形透镜组4 ;一个扩束系统5 ;可控制反射镜6 ;一个聚焦镜7 ;—个被加工的工作件8 ;一个控制装置9。 [0007] The present invention provides a process for the flat top picosecond pulse laser processing system, comprising: a picosecond laser light source I; a multiplier means 2; mirror set three aspherical plastic lens group 4; a diffuser beam system 5; can control the mirror 6; a focusing lens 7; - a work piece to be machined 8; a control device 9.
[0008] 在上述的技术方案中，所述的皮秒激光光源I用来产生加工用的高斯分布皮秒脉宽激光。 [0008] In the above technical solution, the picosecond laser light source for generating process I used Gaussian picosecond pulse laser.
[0009] 在上述的技术方案中，所述的倍频装置2用来将单一波长的皮秒脉宽激光转变成混合波长的激光。 [0009] In the above technical solution, said multiplier means 2 for a single wavelength picosecond laser pulse into a mixed wavelength laser.
[0010] 在上述的技术方案中，所述的反射镜组3包括I至10个的反射镜设置在所述的皮秒激光光源I之后，组合起来控制激光束经过所述的非球面整形透镜组3的中心。 [0010] In the above aspect, the mirror 3 comprises a group of said I to 10 of the reflecting mirror disposed after the picosecond laser source I, a combination of the control of the laser beam passing through the aspheric shaping lens Group Center 3.
[0011] 在上述的技术方案中，所述的非球面整形透镜组4放置于所述的反射镜组3之后，用来将皮秒脉冲高斯光束整形为皮秒脉冲平顶高斯光束。 [0011] In the above technical solution, the plastic aspherical lens group 4 is placed after the mirror set 3 for the picosecond pulse Gaussian beam shaping picosecond pulse flattened Gaussian beams. 非球面整形透镜组3由2到4片透镜构成，包括一片或者两片具有非球面的透镜。 Aspheric plastic lens group 3 is composed of two to four lenses, including two-piece or a lens having aspherical.
[0012] 在上述的技术方案中，所述的扩束系统5放置于所述的非球面整形透镜组4之后，用来调节光束直径。 [0012] In the above technical solution, said beam expander 5 is placed in said non-spherical plastic lens group after 4, used to adjust the beam diameter.
[0013] 在上述的技术方案中，所述的可控制反射镜6放置于所述的扩束系统5之后，用来转折激光方向，同时通过控制系统实现宽范围加工。 [0013] In the above technical solution, the controllable mirror 6 is placed after the beam expander 5 at, for turning the laser direction, while a wide range of processing implemented by the control system. 进行移位加工时，两次加工的光斑通过适当间隙的叠加，能够很好的实现平顶范围的扩宽，示意图3反映了两次加工轨迹比较接近时，交叉部分叠加，形成了扩宽的平顶加工效果。 When the shift processing, machining spot twice the gap through the appropriate overlay, can achieve the flat top range widened Scheme 3 reflecting the processing path when two relatively close to the intersection of superimposed, forming a widening of topping processing results.
[0014] 在上述的技术方案中，所述的聚焦镜7放置于所述的可控制反射镜6之后，用来将皮秒脉冲平顶高斯光束聚焦在被加工的工作件7上。 After [0014] In the above technical solution, said focusing lens 7 is placed in the mirror 6 can be controlled, for picosecond pulse on the flattened Gaussian beams focused at the workpiece to be machined 7.
[0015] 在上述的技术方案中，所述的控制装置9用来控制皮秒激光光源1、非球面整形透镜组4、扩束系统5，反射镜6来实现调节激光功率(能量)、调节聚焦位置、调节加工深度、调节加工范围的功能。 [0015] In the above aspect, the control means 9 for controlling the picosecond laser light source 1, an aspheric plastic lens group 4, beam expander 5, a mirror 6 realized adjusting the laser power (energy), adjusting focus position adjustment processing depth adjustment range of processing functions. 控制装置9可以由计算机或单片电路构成的控制台结合被操纵的硬件实现。 Control means 9 may console by a computer or a combination of monolithic circuit rigged hardware.
[0016] 本发明与已有技术相比具有如下的优点: [0016] The present invention over the prior art has the following advantages:
[0017] 1.本发明的激光加工系统有效的实现了皮秒脉冲激光情况下的平顶高斯光束加工，而皮秒脉冲激光情况下的平顶高斯光束加工可以在被加工件的表面形成很平整的加工痕迹，这在常见的高斯光束加工下是不能实现的。 [0017] The laser processing system 1 of the present invention effectively implement the flattened Gaussian picosecond pulse laser beam processing the case, and flattened Gaussian picosecond pulse laser beam processing in case of a workpiece can be formed on the surface very flat machining marks, which in common Gaussian beam processing can not be achieved.
[0018] 2.相对于现有的平顶加工技术，采用精密控制反射镜移动的技术，提高了平顶加工范围，有效实现了宽范围平顶高斯光束加工。 [0018] 2 with respect to the existing flat top processing technology, using sophisticated control mirrors mobile technology to improve the flat top range of processing, the effective realization of a wide range of flattened Gaussian beam processing.
附图说明 Brief Description
[0019] 图1是通常激光器输出时的高斯光束光强(能量)分布曲线。 [0019] FIG. 1 is a Gaussian beam intensity (energy) of the laser output is typically the distribution curve.
[0020] 图2是平顶高斯光束的光强(能量)分布曲线。 [0020] FIG. 2 is flattened Gaussian beam intensity (energy) distribution curve.
[0021] 图3是两个平顶高斯分布曲线叠加后的光强(能量)分布曲线。 [0021] FIG. 3 is a two flattened Gaussian intensity distribution curve superimposed (energy) distribution curve.
[0022]图4是本发明的结构示意图。 [0022] FIG. 4 is a schematic of the present invention. 其中I为皮秒激光光源；2为倍频装置；3为反射镜组；4为一个非球面整形透镜组；5为一个扩束系统；6为可控制反射镜；7为一个聚焦镜；8为一个被加工的工作件；9为一个控制装置。 Where I is the picosecond laser light source; 2 multiplier means; 3 is a mirror set; 4 is a plastic aspherical lens group; 5 is a beam expander; 6 to be controlled mirrors; 7 is a focusing mirror; 8 a work piece to be processed; 9 as a control means.
[0023] 图5是采用精密控制反射镜移动技术，实现平顶高斯光束宽范围时的加工轨迹图。 [0023] FIG. 5 is a precisely controlled mirrors mobile technology, flattened Gaussian beam machining locus of a wide range. 其中11为常规的加工痕迹，通过直线移动被加工件实现；12为实现平顶高斯光束宽范围精密加工移动的轨迹。 11 is a conventional machining marks, linear movement is implemented through the workpiece; 12 for the realization of flattened Gaussian beam wide range of precision machining moving track.
具体实施方式 DETAILED DESCRIPTION
[0024] 为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图和实施例将对本发明进一步详细说明。 [0024] In order to make the objects, technical solutions and advantages of the present invention will become apparent from the following combination of figures and examples will further illustrate the present invention.
[0025] 实施例1 [0025] Example 1
[0026] 参考图1，制作一个本发明的皮秒脉冲激光加工装置，该装置中使用一台国科激光公司生产的皮秒激光光源，出射的激光经过倍频装置2后，形成了由两种波长混合构成的激光。 [0026] Referring to Figure 1, the production of picosecond pulsed laser processing apparatus of the present invention, the apparatus using a laser produced NSC picosecond laser sources, laser frequency doubling device 2 after the exit, formed by the two hybrid laser wavelengths configuration. 这束激光经过反射镜组3中第一片和第二片反射镜反射后，经过使激光束折转进入非球面整形透镜组4。 This laser beams after the mirror group 3 of the first sheet and the second sheet reflected by the mirror, after the laser beam deflected into a non-spherical plastic lens group 4. 其中反射镜组3可以调节，用来保证光束精确通过非球面整形透镜组4的中心。 Wherein the mirror group 3 can be adjusted to ensure precise beam shaping lens group aspheric center 4. 非球面整形透镜组4由3片透镜构成，包括两片具有非球面的透镜和一片常规透镜。 Aspheric plastic lens group 4 is constituted by three lenses including two aspherical lenses and having a conventional lens. 非球面透镜组4与扩束系统5中的透镜组、聚焦镜需要共同消除像差，来保证加工精度。 Aspherical lens group 4 and 5 in the beam expander lens groups need to work together to eliminate the focusing lens aberrations, to ensure accuracy. 扩束系统5由一片凹透镜和一片凸透镜构成，用来将皮秒激光的光斑直径扩大并送入可控制反射镜6。 Beam expander 5 is composed of a concave lens and a convex lens for the picosecond laser spot diameter can be controlled to expand and fed reflector 6. 扩束系统5的两片透镜可以适当的调节，来控制聚焦加工点。 Beam expander 5, two lenses can be appropriately adjusted to control the focusing processing point. 聚焦镜7放置在适当的位置上，来把平顶高斯分布的皮秒激光聚焦在工作面上。 Focusing mirror 7 is placed in the appropriate position to the flattened Gaussian picosecond laser focus on the work surface. 可控制反射镜6和聚焦镜7可以通过控制装置9来进行操纵，通过左右平移来实现平顶高斯光束的移位宽范围加工。 You can control the focusing mirror mirror 6 and 7 may be carried out by the control device 9 manipulated by panning left and right to achieve flattened Gaussian beam wide range shift processing. 加工时按照如下步骤:1、首先控制装置8控制反射镜5和聚焦镜6远离扩束系统4，在加工件上形成一条痕迹；2、然后加工件进行微小的位移；3、控制装置8再控制反射镜5和聚焦镜6向扩束系统4方向移动，在加工件上形成第二条痕迹。 When processing the following steps: 1, the first control unit 8 controls mirror 5 and 6 away from the focusing mirror beam expander 4, the workpiece to form a trace; 2, and then the workpiece minor displacement; 3, the control unit 8 again control mirror 5 and the focusing mirror to move the beam expander 4 direction 6, a second mark on the workpiece. 加工件进行的微小位移用来保证两次平顶高斯光束加工时的光束能量分布在如图3所示的位置上，这样就能构成一个平坦的顶部能量分布。 Small displacement workpiece carried to ensure energy beam machining twice flattened Gaussian beam profile at the position shown in Figure 3, so that we can form a flat top energy distribution. 而上述加工步骤反复进行就可以实现宽范围的平顶加工。 And repeating the above process steps can achieve a wide range of flat-top processing. 控制装置8由电脑、计算机软件结合电动平移台实现。 Control unit 8 is composed of a computer, computer software combines electric translation stage implementation.
[0027] 实施例2 [0027] Example 2
[0028] 参考图1，制作一个本发明的皮秒脉冲激光加工装置，该装置中使用一台Coherent公司生产的皮秒激光光源，出射的激光照射在反射镜组2。 [0028] Referring to Figure 1, picosecond pulse laser processing apparatus to produce a present invention, the device produced using a Coherent picosecond laser sources, laser radiation emitted in the mirror group 2. 反射镜组2由3片反射镜构成，经过反射镜组2折转后的激光进入非球面整形透镜组3。 Group 2 consists of a mirror reflector constitute three, Group 2 after laser mirrors folded after entering the aspherical plastic lens group 3. 其中反射镜组2整合在一个固定的机械结构件中，并保证光束精确通过非球面整形透镜组3的中心。 Wherein the mirror group 2 integrated in a fixed mechanical structure member, and to ensure that the light beam accurately through the center of an aspheric plastic lens group 3. 非球面整形透镜组3由两片具有非球面的透镜构成。 Aspheric plastic lens group 3 is composed of two lenses having aspherical. 扩束系统4是一片凹透镜和一片凸透镜构成的一个固定镜筒，或者仅由一片凹面透镜构成，用来将皮秒激光的光斑直径扩大并送入反射镜5。 Beam expander 4 is a concave lens and a convex lens of a fixed barrel, or consist only of a concave lens is used to expand the picosecond laser spot diameter and fed into the mirror 5. 反射镜5和聚焦镜6固定在适当的位置上，来把平顶高斯分布的皮秒激光聚焦在工作面上进行皮秒脉宽平顶高斯光束的加工。 Focusing mirror mirror 5 and 6 is fixed in place on to the flattened Gaussian picosecond laser focus on the work surface were flattened Gaussian beam picosecond pulse processing.
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