ininventor:"Grant R. Flaharty" - Google Search

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2 results

Seal and support structure for semiconductor wafer

www.google.com/patents/WO2004104708A3?cl=en

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A Support structure (16) is applied directly to the first side (14) of a semiconductor
work piece (10) or wafer by a stereolithographic process ...

Stereolithographic seal and support structure for semiconductor wafer

www.google.com/patents/EP1623277A2?cl=en

‎

A Support structure (16) is applied directly to the first side (14) of a semiconductor
work piece (10) or wafer by a stereolithographic process ...

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